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X-ray nanolithography: Extension to the limits of the lithographic process
Henry I. Smith, M.L. Schattenburg, S.D. Hector, J. Ferrera, E.E. Moon, I.Y. Yang, M. BurkhardtVolume:
32
Year:
1996
Language:
english
Pages:
16
DOI:
10.1016/0167-9317(95)00183-2
File:
PDF, 2.24 MB
english, 1996