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Volume 32; Issue 1-4
Main
Microelectronic Engineering
Volume 32; Issue 1-4
Microelectronic Engineering
Volume 32; Issue 1-4
1
The nanoworld: chances and challenges
H. Rohrer
Journal:
Microelectronic Engineering
Year:
1996
Language:
english
File:
PDF, 2.02 MB
Your tags:
english, 1996
2
Pattern transfer: Self-assembled monolayers as ultrathin resists
Younan Xia
,
Xiao-Mei Zhao
,
George M. Whitesides
Journal:
Microelectronic Engineering
Year:
1996
Language:
english
File:
PDF, 3.43 MB
Your tags:
english, 1996
3
Dry etching and induced damage
E. van der Drift
,
R. Cheung
,
T. Zijlstra
Journal:
Microelectronic Engineering
Year:
1996
Language:
english
File:
PDF, 1.13 MB
Your tags:
english, 1996
4
Surface modification in the optical near field
G. Krausch
,
J. Mlynek
Journal:
Microelectronic Engineering
Year:
1996
Language:
english
File:
PDF, 1.14 MB
Your tags:
english, 1996
5
Diffraction optics for X-ray imaging
G. Schmahl
,
D. Rudolph
,
G. Schneider
,
J. Thieme
,
T. Schliebe
,
B. Kaulich
,
M. Hettwer
Journal:
Microelectronic Engineering
Year:
1996
Language:
english
File:
PDF, 7.31 MB
Your tags:
english, 1996
6
Nanolithography on hydrogen-terminated silicon by scanning-probe microscopy
Christian Schönenberger
,
Niels Kramer
Journal:
Microelectronic Engineering
Year:
1996
Language:
english
File:
PDF, 6.08 MB
Your tags:
english, 1996
7
Single-electron devices
Haroon Ahmed
,
Kazuo Nakazato
Journal:
Microelectronic Engineering
Year:
1996
Language:
english
File:
PDF, 2.14 MB
Your tags:
english, 1996
8
Fabrication and uniformity issues in λ/4 shifted DFB laser arrays using e-beam generated contact grating masks
D.M. Tennant
,
T.L. Koch
Journal:
Microelectronic Engineering
Year:
1996
Language:
english
File:
PDF, 2.57 MB
Your tags:
english, 1996
9
Downscaling ULSIs by using nanoscale engineering
Shojiro Asai
,
Yasuo Wada
,
Eiji Takeda
Journal:
Microelectronic Engineering
Year:
1996
Language:
english
File:
PDF, 8.52 MB
Your tags:
english, 1996
10
X-ray nanolithography: Extension to the limits of the lithographic process
Henry I. Smith
,
M.L. Schattenburg
,
S.D. Hector
,
J. Ferrera
,
E.E. Moon
,
I.Y. Yang
,
M. Burkhardt
Journal:
Microelectronic Engineering
Year:
1996
Language:
english
File:
PDF, 2.24 MB
Your tags:
english, 1996
11
Electron beam technology—SEM to microcolumn
T.H.P. Chang
,
M.G.R. Thomson
,
M.L. Yu
,
E. Kratschmer
,
H.S. Kim
,
K.Y. Lee
,
S.A. Rishton
,
S. Zolgharnain
Journal:
Microelectronic Engineering
Year:
1996
Language:
english
File:
PDF, 1.49 MB
Your tags:
english, 1996
12
III–V Nanoelectronics
Steven P. Beaumont
Journal:
Microelectronic Engineering
Year:
1996
Language:
english
File:
PDF, 1.44 MB
Your tags:
english, 1996
13
Electron beam lithography—Resolution limits
A.N. Broers
,
A.C.F. Hoole
,
J.M. Ryan
Journal:
Microelectronic Engineering
Year:
1996
Language:
english
File:
PDF, 2.62 MB
Your tags:
english, 1996
14
Binary optics: A VLSI-based microoptics technology
Margaret B. Stern
Journal:
Microelectronic Engineering
Year:
1996
Language:
english
File:
PDF, 4.52 MB
Your tags:
english, 1996
15
Quantum wires and dots for optical studies
A. Forchel
,
P. Ils
,
K.H. Wang
,
O. Schilling
,
R. Steffen
,
J. Oshinowo
Journal:
Microelectronic Engineering
Year:
1996
Language:
english
File:
PDF, 2.69 MB
Your tags:
english, 1996
16
Scanning probe microscopy for nanometer inspections and industrial applications
W. Gutmannsbauer
,
H.J. Hug
,
E. Meyer
Journal:
Microelectronic Engineering
Year:
1996
Language:
english
File:
PDF, 8.17 MB
Your tags:
english, 1996
17
Extraction, deposition, and displacement of atoms by STM
T. Nakayama
,
D.-H. Huang
,
M. Aono
Journal:
Microelectronic Engineering
Year:
1996
Language:
english
File:
PDF, 3.25 MB
Your tags:
english, 1996
18
Potential nanoelectronic integrated circuit technologies
John Randall
,
Gary Frazier
,
Alan Seabaugh
,
Tom Broekaert
Journal:
Microelectronic Engineering
Year:
1996
Language:
english
File:
PDF, 3.24 MB
Your tags:
english, 1996
19
Nanofabrication by FIB
Kenji Gamo
Journal:
Microelectronic Engineering
Year:
1996
Language:
english
File:
PDF, 4.32 MB
Your tags:
english, 1996
20
Nanosensors and molecular recognition
Wolfgang Göpel
Journal:
Microelectronic Engineering
Year:
1996
Language:
english
File:
PDF, 6.73 MB
Your tags:
english, 1996
21
Proximal probe lithography and surface modification
C.R.K. Marrian
,
E.S. Snow
Journal:
Microelectronic Engineering
Year:
1996
Language:
english
File:
PDF, 4.16 MB
Your tags:
english, 1996
22
SCREAM MicroElectroMechanical Systems
Noel C. MacDonald
Journal:
Microelectronic Engineering
Year:
1996
Language:
english
File:
PDF, 6.68 MB
Your tags:
english, 1996
23
Scaling silicon MOS devices to their limits
S.J. Wind
,
D.J. Frank
,
H.-S. Wong
Journal:
Microelectronic Engineering
Year:
1996
Language:
english
File:
PDF, 2.76 MB
Your tags:
english, 1996
24
The electron-beam and x-ray lithographic performance of the high resolution CAMP and ARCH family of chemically amplified resists
Anthony E. Novembre
,
Norbert Münzel
Journal:
Microelectronic Engineering
Year:
1996
Language:
english
File:
PDF, 2.16 MB
Your tags:
english, 1996
25
Editorial Board
Journal:
Microelectronic Engineering
Year:
1996
Language:
english
File:
PDF, 69 KB
Your tags:
english, 1996
26
Preface
Peter Vettiger
,
Urs Staufer
,
Dieter P. Kern
Journal:
Microelectronic Engineering
Year:
1996
Language:
english
File:
PDF, 142 KB
Your tags:
english, 1996
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