Optical and compositional studies of buried oxide layers in silicon formed by high dose implantation
R.J. Chater, J.A. Kilner, E. Scheid, S. Cristoloveneau, P.L.F. Hemment, K.J. ReesonVolume:
30
Year:
1987
Language:
english
Pages:
7
DOI:
10.1016/0169-4332(87)90116-4
File:
PDF, 353 KB
english, 1987