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Evaluation of dopant profiles and diffusion constants by means of electron energy loss spectroscopy
A. Förster, J.M. Layet, H. LüthVolume:
41-42
Year:
1989
Language:
english
Pages:
6
DOI:
10.1016/0169-4332(89)90076-7
File:
PDF, 484 KB
english, 1989