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Structural studies of ultrathin silicon oxides and their interfaces by XPS
Takeo Hattori, Hiroaki Yamagishi, Noboru Koike, Keitaro Imai, Kikuo YamabeVolume:
41-42
Year:
1989
Language:
english
Pages:
4
DOI:
10.1016/0169-4332(89)90094-9
File:
PDF, 359 KB
english, 1989