Pyrolysis and IR laser photolysis of SiH4 molecules in the presence of non reactive and reactive additives
M. Bertolotti, D. Consalvo, A. Mele, A. Giardini-Guidoni, R. TeghilVolume:
36
Year:
1989
Language:
english
Pages:
6
DOI:
10.1016/0169-4332(89)90902-1
File:
PDF, 323 KB
english, 1989