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Volume 36; Issue 1-4
Main
Applied Surface Science
Volume 36; Issue 1-4
Applied Surface Science
Volume 36; Issue 1-4
1
Preface
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 95 KB
Your tags:
english, 1989
2
Conference organisation
Journal:
Applied Surface Science
Year:
1989
File:
PDF, 23 KB
Your tags:
1989
3
A thermal description of the melting of c- and a-silicon under pulsed excimer lasers
S. de Unamuno
,
E. Fogarassy
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 532 KB
Your tags:
english, 1989
4
Numerical simulation of temperature distributions in layered structures during laser processing
J. Levoska
,
T.T. Rantala
,
J. Lenkkeri
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 545 KB
Your tags:
english, 1989
5
Low temperature plasma enhanced CVD of highly conductive single crystalline and polycrystalline silicon materials
J. Nijs
,
K. Baert
,
J. Symons
,
K. Kobayashi
,
P. Deschepper
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 1.44 MB
Your tags:
english, 1989
6
Delta-type doping profiles in silicon
I. Eisele
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 1.13 MB
Your tags:
english, 1989
7
Synthesis of silicon carbide powders by a CW CO2 laser
F. Curcio
,
G. Ghiglione
,
M. Musci
,
C. Nannetti
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 530 KB
Your tags:
english, 1989
8
Low temperature photon-controlled growth of thin films and multilayered structures
D.H. Lowndes
,
D.B. Geohegan
,
D. Eres
,
S.J. Pennycook
,
D.N. Mashburn
,
G.E. Jellison Jr.
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 921 KB
Your tags:
english, 1989
9
ArF laser photochemical deposition of amorphous silicon from disilane: Spectroscopic studies and comparison with thermal CVD
D. Eres
,
D.B. Geohegan
,
D.H. Lowndes
,
D.N. Mashburn
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 641 KB
Your tags:
english, 1989
10
Pyrolysis and IR laser photolysis of SiH4 molecules in the presence of non reactive and reactive additives
M. Bertolotti
,
D. Consalvo
,
A. Mele
,
A. Giardini-Guidoni
,
R. Teghil
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 323 KB
Your tags:
english, 1989
11
Photoassisted MBE of CdTe thin films
R.N. Bicknell-Tassius
,
T.A. Kuhn
,
W. Ossau
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 358 KB
Your tags:
english, 1989
12
Precursors for thin film oxides by photo-MOCVD
C. Trundle
,
C.J. Brierley
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 569 KB
Your tags:
english, 1989
13
CW and pulsed UV laser-induced deposition from Cr(CO)6, Mo(CO)6, and W(CO)6
Robert L. Jackson
,
George W. Tyndall
,
Scott D. Sather
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 1.81 MB
Your tags:
english, 1989
14
Low temperature oxidation of crystalline silicon using excimer laser irradiation
Vishal Nayar
,
Ian W. Boyd
,
F.N. Goodall
,
G. Arthur
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 739 KB
Your tags:
english, 1989
15
Pulsed laser ablative deposition of thin metal films
P. Mogyorósi
,
T. Szörényi
,
K. Bali
,
Zs. Tóth
,
I. Hevesi
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 473 KB
Your tags:
english, 1989
16
Growth model for microcrystalline silicon
R.C. Van Oort
,
M.J. Geerts
,
J.C. Van den Heuvel
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 325 KB
Your tags:
english, 1989
17
Laser-induced chemical vapor deposition of chromium films from chromiumhexacarbonyl using a KrF excimer laser
R. Nowak
,
L. Konstantinov
,
P. Hess
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 413 KB
Your tags:
english, 1989
18
Oxide growth on silicides in oxygen plasma
A. Climent
,
J.P. Enard
,
B. Lavernhe
,
J. Perriere
,
A. Straboni
,
B. Vuillermoz
,
D. Levy
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 456 KB
Your tags:
english, 1989
19
Modelling of silicon nitride deposition by 254 nm Hg-photosensitization and 185 nm photolysis of SiH4/NH3 gas mixture
Bruno Allain
,
Jérôme Perrin
,
Jean Luc Guizot
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 369 KB
Your tags:
english, 1989
20
Excimer laser photolysis of organometallic compounds for Zn deposition
E. Borsella
,
R. Larciprete
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 398 KB
Your tags:
english, 1989
21
Characterization of ion-beam-sputtered tungsten films on silicon
Françoise Meyer
,
Christian Schwebel
,
Claude Pellet
,
Guy Gautherin
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 462 KB
Your tags:
english, 1989
22
Low-temperature crystallisation of amorphous-silicon films for the fabrication of thin-film transistors
O.S. Panwar
,
R.A. Moore
,
N.S.J. Mitchell
,
H.S. Gamble
,
B.M. Armstrong
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 834 KB
Your tags:
english, 1989
23
UV laser etching processes for film layers used in silicon integrated circuits
G.L. Loper
,
S.H. Suck-Salk
,
M.D. Tabat
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 576 KB
Your tags:
english, 1989
24
Mercury cadmium telluride chemically photo-assisted etching
J.C. Roustan
,
A. Azema
,
J. Botineau
,
Ph. Gaucherel
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 528 KB
Your tags:
english, 1989
25
On the application of XPS, SSIMS and QCM to study the surface of a CF4/O2 plasma treated polycarbonate
E. Occhiello
,
M. Morra
,
F. Gardassi
,
J. Bargon
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 553 KB
Your tags:
english, 1989
26
Silicon damage and residue overlayer caused by rie and ribe processes with CHF3
Ch. Cardinaud
,
G. Turban
,
B. Grolleau
,
J.P. Grandchamp
,
C. Lejeune
,
P. Scheiblin
,
E. Collard
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 469 KB
Your tags:
english, 1989
27
Carbonaceous overlayer and near-surface damage after pure CF4 reactive ion beam etching of silicon: Exposure dose effects
C. Lejeune
,
J.P. Grandchamp
,
J.P. Gilles
,
E. Collard
,
P. Scheiblin
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 607 KB
Your tags:
english, 1989
28
Laser assisted diffusion in GaAs from thin evaporated layers
B.J. Garcia
,
J. Martinez
,
J. Piqueras
,
J.L. Castaño
,
C. Fontaine
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 417 KB
Your tags:
english, 1989
29
Optimazation of the parameters involved in the photochemical doping of Si with a pulsed ArF excimer laser
F. Foulon
,
A. Slaoui
,
E. Fogarassy
,
R. Stuck
,
C. Fuchs
,
P. Siffert
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 444 KB
Your tags:
english, 1989
30
Laser doping of silicon role of the surface status in the incorporation mechanism
G.G. Bentini
,
M. Bianconi
,
L. Correra
,
R. Nipoti
,
D.A. Patti
,
A. Gasparotto
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 326 KB
Your tags:
english, 1989
31
Defect production during the fabrication of SOI by oxygen ion implantation
R.C. Barklie
,
T.J. Ennis
,
K. Reeson
,
P.L.F. Hemment
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 464 KB
Your tags:
english, 1989
32
Titanium diffusion into LiNbO3 using excimer laser beam
S.A.M. Al-Chalabi
,
F. Goodall
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 320 KB
Your tags:
english, 1989
33
Interstitial chromium behaviour in silicon during rapid thermal annealing
J. Zhu
,
D. Barbier
,
L. Mayet
,
M. Gavand
,
G. Chaussemy
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 419 KB
Your tags:
english, 1989
34
Influence of DUV excimer laser radiation (λ = 193 nm) on CMOS devices
K. Eden
,
H. Beneking
,
W. Roth
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 463 KB
Your tags:
english, 1989
35
Microfocused ion beam applications in microelectronics
L.R. Harriott
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 1.32 MB
Your tags:
english, 1989
36
Metal photodeposition and light-induced nucleation
J. Flicstein
,
J.E. Bourée
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 1.60 MB
Your tags:
english, 1989
37
The structure of nanocrystalline silicon formed by laser-induced explosive crystallization
W.C. Sinke
,
T. Warabisako
,
M. Miyao
,
T. Tokuyama
,
S. Roorda
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 568 KB
Your tags:
english, 1989
38
Energy transfer and size effects by laser irradiation of solid (metallic) samples presenting surface periodical structures basic processes and applications
I. Ursu
,
I.N. Mihailescu
,
Cālina-Diana Campean
,
A.M. Prokhorov
,
V.I. Konov
,
V.N. Tokarev
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 746 KB
Your tags:
english, 1989
39
Sub-micron lithography techniques
Ronald A. Lawes
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 2.42 MB
Your tags:
english, 1989
40
Silicon carbide formation with e-beam and laser pulses
E. D'Anna
,
G. Leggieri
,
A. Luches
,
V. Nassisi
,
A. Perrone
,
G. Majni
,
P. Mengucci
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 749 KB
Your tags:
english, 1989
41
Laser alloying of AuTe contacts on GaAs
K. Wuyts
,
J. Van Grunderbesk
,
R.E. Silverans
,
M. Van Hove
,
M. Van Rossum
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 665 KB
Your tags:
english, 1989
42
Nitriding of bulk titanium and thin titanium films in a NH3 low pressure plasma
N. Laidani
,
J. Perriere
,
D. Lincot
,
A. Gicquel
,
J. Amouroux
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 376 KB
Your tags:
english, 1989
43
Chemical reactivity of the gaseous species in a plasma discharge in air: An acid-base study
J.L. Brisset
,
A. Doubla
,
J. Amouroux
,
J. Lelievre
,
M. Goldmann
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 462 KB
Your tags:
english, 1989
44
Laser and ion beam processing of conductive polyimide
J. Davenas
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 291 KB
Your tags:
english, 1989
45
Outdiffusion modelling of arsenic from As+ implanted crystalline p-type silicon during rapid thermal annealing
S.N. Kumar
,
G. Chaussemy
,
B. Cauut
,
D. Barbier
,
A. Laugier
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 502 KB
Your tags:
english, 1989
46
Effect of rapid thermal processing on the intragrain properties of polysilicon as deduced from LBIC analysis
K. Masri
,
J.P. Boyeaux
,
S.N. Kumar
,
L. Mayet
,
G. Chaussemy
,
A. Laugier
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 790 KB
Your tags:
english, 1989
47
Characteristics of electron traps in rapidly thermal annealed GaAs using a capping proximity technique
G. Marrakchi
,
J.F. Joly
,
F. Vincent
,
G. Chaussemy
,
A. Laugier
,
G. Guillot
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 359 KB
Your tags:
english, 1989
48
Enhanced mobility in SOI films annealed by rapid thermal annealing
A. Almaggoussi
,
J. Sicart
,
J.L. Robert
,
J.F. Joly
,
A. Laugier
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 290 KB
Your tags:
english, 1989
49
Generation and electrical characterization of thick SOI films
B. Tillack
,
R. Banisch
,
H.H. Richter
,
K. Hoeppner
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 590 KB
Your tags:
english, 1989
50
Rapid nucleation in pulsed laser heated amorphous Si
S. Roorda
,
W.C. Sinke
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 461 KB
Your tags:
english, 1989
51
Combined CW laser and furnace annealing of amorphous Si and Ge in contact with some metals
S. Caune
,
J. Marfaing
,
W. Marine
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 820 KB
Your tags:
english, 1989
52
Selective crystallization of silicon layers without seeding and capping layer
C. Stumpff
,
H. Sigmund
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 841 KB
Your tags:
english, 1989
53
Seed window defects in silicon on insulator material
D.A. Williams
,
R.A. McMahon
,
H. Ahmed
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 1.56 MB
Your tags:
english, 1989
54
Study of dashed seed lines and capping layers for laser seeded zone melting recrystallization
J.L. Mermet
,
H. Achard
,
H. Bono
,
J.P. Joly
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 435 KB
Your tags:
english, 1989
55
Explosive crystallization phenomena in SOI structures
H.D. Geiler
,
E. Glaser
,
G. Andrä
,
D. Wolff
,
G. Götz
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 778 KB
Your tags:
english, 1989
56
Excimer laser induced crystallization and oxidation of amorphous Cr thin films
I. Ursu
,
M.I. Birjega
,
M. Dinescu
,
I.N. Mihailescu
,
N. Popescu-Pogrion
,
L. Rubco
,
A.M. Prokhorov
,
V.I. Konov
,
V.N. Tokarev
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 1.82 MB
Your tags:
english, 1989
57
Electron bombardment applied to EPR polysilicon ribbon crystal growth
R. M'Ghaieth
,
R. Gauthier
,
P. Pinard
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 323 KB
Your tags:
english, 1989
58
Rapid electron beam induced tantalum-silicon reactions
V.K. Raman
,
F. Mahmood
,
R.A. McMahon
,
H. Ahmed
,
C. Jeynes
,
D. Sarkar
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 1.12 MB
Your tags:
english, 1989
59
Ablation of metal particles by surface plasmon excitation with laser light
W. Hoheisel
,
U. Schulte
,
M. Vollmer
,
R. Weidenauer
,
F. Träger
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 429 KB
Your tags:
english, 1989
60
Characterization of epitaxial silicon layers made by reduced pressure/temperature CVD
J.L. Regolini
,
D. Bensahel
,
E. Scheid
,
A. Perio
,
J. Mercier
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 519 KB
Your tags:
english, 1989
61
Author index
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 309 KB
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english, 1989
62
Subject index
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 577 KB
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english, 1989
63
Editorial Board
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 83 KB
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english, 1989
64
Supporting organisations and sponsors
Journal:
Applied Surface Science
Year:
1989
File:
PDF, 31 KB
Your tags:
1989
65
Precision surface temperature measurement and film characterization for LICVD of a-Si: H from SiH4
K. Hesch
,
P. Hess
,
H. Oetzmann
,
C. Schmidt
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 410 KB
Your tags:
english, 1989
66
Deposition of high quality SiO2 layers from TEOS by excimer laser
A. Klumpp
,
H. Sigmund
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 338 KB
Your tags:
english, 1989
67
Evaporation of solids by pulsed laser irradiation
H. Stafast
,
M. Von Przychowski
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 355 KB
Your tags:
english, 1989
68
Thin layers obtained by plasma jet deposition at low pressure: Characterization of the layers, growth velocity and comparison with other methods
J. Guilly
,
M. Pennaneach
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 257 KB
Your tags:
english, 1989
69
Plasma nitrided oxide films as a thin gate dielectric
P. Debenest
,
K. Barla
,
A. Straboni
,
B. Vuillermoz
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 440 KB
Your tags:
english, 1989
70
Investigation of the mechanism of CO2 laser driven production of ultrafine sinterable (Si3N4 and SiC) powders
E. Borsella
,
L. Caneve
,
R. Fantoni
,
S. Piccirillo
,
N. Basili
,
S. Enzo
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 356 KB
Your tags:
english, 1989
71
An in situ infrared study of the room temperature oxidation of silicon with atomic and molecular oxygen
W.C.M. Claassen
,
R.W.A.H. Schmitz
,
J. Dieleman
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 287 KB
Your tags:
english, 1989
72
Microwave multipolar plasma for etching and deposition
Rudolf R. Burke
,
Claude Pomot
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 579 KB
Your tags:
english, 1989
73
Semiconductor surface etching by halogens: Fundamental steps
R.B. Jackman
,
R.J. Price
,
J.S. Foord
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 1.04 MB
Your tags:
english, 1989
74
Laser-induced photoetching of semiconductors and metals
J.L. Peyre
,
Ch. Vannier
,
D. Riviere
,
G. Villela
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 619 KB
Your tags:
english, 1989
75
Laser photoablation of spin-on-glass and poly(ethyl cyanoacrylate) photoresist
M. Hogan
,
J.D. Magan
,
W. Blau
,
J.G. Lunney
,
J. Woods
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 850 KB
Your tags:
english, 1989
76
Fine structuring of magnetic and high-Tc superconducting ceramic oxides in an HCI plasma
M.G.J. Heijman
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 1.34 MB
Your tags:
english, 1989
77
CW-laser induced chemical etching of thin silver and molybdenum films
P. Mogyorósi
Journal:
Applied Surface Science
Year:
1989
Language:
english
File:
PDF, 1.27 MB
Your tags:
english, 1989
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