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Round robin investigation of silicon oxide on silicon reference materials for ellipsometry
J. Vanhellemont, H.E. Maes, M. Schaekers, A. Armigliato, H. Cerva, A. Cullis, J. de Sande, H. Dinges, J. Hallais, V. Nayar, C. Pickering, J.-L. Stehlé, J. Van Landuyt, C. Walker, H. Werner, P. SalieriVolume:
63
Year:
1993
Language:
english
Pages:
7
DOI:
10.1016/0169-4332(93)90062-g
File:
PDF, 591 KB
english, 1993