books search
books
articles search
articles
Donate
Log In
Log In
to access more features
personal recommendations
Telegram Bot
download history
send to Email or Kindle
manage booklists
save to favorites
Explore
Journals
Contribution
Donate
Litera Library
Donate paper books
Add paper books
Open LITERA Point
Volume 63; Issue 1-4
Main
Applied Surface Science
Volume 63; Issue 1-4
Applied Surface Science
Volume 63; Issue 1-4
1
Editorial Board
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 113 KB
Your tags:
english, 1993
2
Preface
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 58 KB
Your tags:
english, 1993
3
Conference organization
Journal:
Applied Surface Science
Year:
1993
File:
PDF, 20 KB
Your tags:
1993
4
Supporting organizations and sponsors
Journal:
Applied Surface Science
Year:
1993
File:
PDF, 16 KB
Your tags:
1993
5
In situ spectroscopic ellipsometry in molecular beam epitaxy for photonic devices
G.N. Maracas
,
J.L. Edwards
,
D.S. Gerber
,
R. Droopad
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 454 KB
Your tags:
english, 1993
6
Insitu spectral ellipsometry for real-time measurement and control
Walter M. Duncan
,
Steven A. Henck
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 442 KB
Your tags:
english, 1993
7
In situ spectroscopic ellipsometry studies of electron cyclotron resonance (ECR) plasma etching of oxides of silicon and GaAs
N.J. Ianno
,
S. Nafis
,
Paul G. Snyder
,
Blaine Johs
,
John A. Woollam
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 244 KB
Your tags:
english, 1993
8
Spectroscopic ellipsometry characterisation of light-emitting porous silicon structures
C. Pickering
,
L.T. Canham
,
D. Brumhead
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 228 KB
Your tags:
english, 1993
9
In situ studies of semiconductor processes by spectroellipsometry
B. Drévillon
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 468 KB
Your tags:
english, 1993
10
Growth mode of ultrathin Sb layers on Si studied by spectroscopic ellipsometry and Raman scattering
U. Rossow
,
U. Frotscher
,
N. Esser
,
U. Resch
,
Th. Müller
,
W. Richter
,
D.A. Woolf
,
R.H. Williams
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 269 KB
Your tags:
english, 1993
11
Criteria for the extraction of SIMOX material parameters from spectroscopic ellipsometry data
S. Lynch
,
G.M. Crean
,
R. Greef
,
J. Stoemonos
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 325 KB
Your tags:
english, 1993
12
Round robin investigation of silicon oxide on silicon reference materials for ellipsometry
J. Vanhellemont
,
H.E. Maes
,
M. Schaekers
,
A. Armigliato
,
H. Cerva
,
A. Cullis
,
J. de Sande
,
H. Dinges
,
J. Hallais
,
V. Nayar
,
C. Pickering
,
J.-L. Stehlé
,
J. Van Landuyt
,
C. Walker
,
H. Werner
,
P. Salieri
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 591 KB
Your tags:
english, 1993
13
Spectroscopic ellipsometric characterization of Si/Si1−xGex strained-layer supperlattices
H. Yao
,
J.A. Woollam
,
P.J. Wang
,
M.J. Tejwani
,
S.A. Alterovitz
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 261 KB
Your tags:
english, 1993
14
The influence of nanocrystals on the dielectric function of porous silicon
H. Münder
,
M.G. Berger
,
H. Lüth
,
U. Rossow
,
U. Frotscher
,
W. Richter
,
R. Herino
,
M. Ligeon
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 252 KB
Your tags:
english, 1993
15
Some examples of depth resolution in SIMS analysis
G. Prudon
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 497 KB
Your tags:
english, 1993
16
Process control for III–V semiconductor device fabrication using mass spectroscopy
A.P. Webb
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 239 KB
Your tags:
english, 1993
17
Sputter induced resonant ionization spectroscopy for trace analysis in silicon
L. Johann
,
R. Stuck
,
Ph. Kern
,
B. Sipp
,
P. Siffert
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 231 KB
Your tags:
english, 1993
18
Contamination control and ultrasensitive chemical analysis
H. Ryssel
,
L. Frey
,
N. Streckfuss
,
R. Schork
,
F. Kroninger
,
T. Falter
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 562 KB
Your tags:
english, 1993
19
Organic contamination of silicon wafers by buffered oxide etching
M. Beyer
,
K. Budde
,
W. Holzapfel
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 278 KB
Your tags:
english, 1993
20
Application of advanced contamination analysis for qualification of wafer handling systems and chucks
F. Kroninger
,
N. Streckfuss
,
L. Frey
,
T. Falter
,
C. Ryzlewicz
,
L. Pfitzner
,
H. Ryssel
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 371 KB
Your tags:
english, 1993
21
In situ optical spectroscopy of surfaces and interfaces with submonolayer resolution
J.F. McGilp
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 438 KB
Your tags:
english, 1993
22
Thermal desorption of amorphous arsenic caps from GaAs(100) monitored by reflection anisotropy spectroscopy
U. Resch
,
S.M. Scholz
,
U. Rossow
,
A.B. Müller
,
W. Richter
,
A. Förster
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 246 KB
Your tags:
english, 1993
23
Optical second harmonic generation from the Si(111)-Sb interface
J.R. Power
,
J.F. McGilp
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 199 KB
Your tags:
english, 1993
24
Surface-sensitive multiple internal reflection spectroscopy as a tool to study surface mechanisms in CVD: the example of UV photodeposition of silicon dioxide and silicon nitride
C. Licoppe
,
C. Debauche
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 225 KB
Your tags:
english, 1993
25
On the assessment of local stress distributions in integrated circuits
J. Vanhellemont
,
I. De Wolf
,
K.G.F. Janssens
,
S. Frabboni
,
R. Balboni
,
A. Armigliato
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 573 KB
Your tags:
english, 1993
26
Strain analysis of multilayered silicon-based contact structures
E. Zolotoyabko
,
A. Ashkenazi
,
Y. Komem
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 338 KB
Your tags:
english, 1993
27
In-process control of silicide formation during rapid thermal processing
J.-M. Dilhac
,
C. Ganibal
,
N. Nolhier
,
P.B. Moynagh
,
C.P. Chew
,
P.J. Rosser
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 202 KB
Your tags:
english, 1993
28
In situ ellipsometry for real-time feedback control of oxidation furnaces
C. Schneider
,
R. Berger
,
L. Pfitzner
,
H. Ryssel
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 396 KB
Your tags:
english, 1993
29
Optical characterization of the electrical properties of processed GaAs
O.J. Glembocki
,
J.A. Dagata
,
E.S. Snow
,
D.S. Katzer
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 555 KB
Your tags:
english, 1993
30
Optical study of band bending and interface recombination at Sb, S and Se covered gallium arsenide surfaces
S. Hildebrandt
,
J. Schreiber
,
W. Kircher
,
R. Kuzmenko
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 273 KB
Your tags:
english, 1993
31
Photoreflectance investigation of dry-etch-induced damage in semi-insulating GaAs substrates
M. Murtagh
,
P.V. Kelly
,
P.A.F. Herbert
,
M. O'Connor
,
G. Duffy
,
G.M. Crean
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 267 KB
Your tags:
english, 1993
32
Contactless electromodulation for in situ characterization of semiconductor processing
X. Yin
,
X. Guo
,
F.H. Pollak
,
G.D. Pettit
,
D.T. McInturff
,
J.M. Woodall
,
Eun-Hee Cirlin
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 246 KB
Your tags:
english, 1993
33
Photoreflectance versus ellipsometry investigation of GaAs/Al0.3Ga0.7As MQW's
V. Bellani
,
A. Borghesi
,
M. Geddo
,
G. Guizzetti
,
A. Stella
,
Chen Chen-Jia
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 249 KB
Your tags:
english, 1993
34
Temperature dependence of the photoreflectance of strained and lattice-matched InGaAs/InAlAs single quantum wells
Y. Baltagi
,
S. Monéger
,
A. Tabata
,
T. Benyattou
,
C. Bru
,
A. Georgakilas
,
K. Zekentes
,
G. Halkias
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 253 KB
Your tags:
english, 1993
35
Optical tools for intermixing diagnostic: application to InGaAs/InGaAsP microstructures
H. Peyre
,
F. Alsina
,
S. Juillaguet
,
E. Massone
,
J. Camassel
,
J. Pascual
,
R.W. Glew
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 261 KB
Your tags:
english, 1993
36
Characterization of lattice-matched and strained GaInAs/AlInAs HEMT structures by photoluminescence spectroscopy
A. Tabata
,
T. Benyattou
,
G. Guillot
,
A. Georgakilas
,
K. Zekentes
,
G. Halkias
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 242 KB
Your tags:
english, 1993
37
Interface characterization of strained InGaAs/InP quantum wells after a growth interruption sequence
R. Schwedler
,
B. Gallmann
,
K. Wolter
,
A. Kohl
,
K. Leo
,
H. Kurz
,
S. Juillaguet
,
E. Massone
,
J. Camassel
,
J.P. Laurenti
,
F.H. Baumann
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 217 KB
Your tags:
english, 1993
38
Electric field dependence of allowed and forbidden transitions in In0.53Ga0.47As/In0.52Al0.48As single quantum wells by room temperature modulation spectroscopy
A. Dimoulas
,
J. Leng
,
K.P. Giapis
,
A. Georgakilas
,
G. Halkias
,
A. Christou
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 329 KB
Your tags:
english, 1993
39
Optical characterization of InP/InAlAs/InP interfaces grown by MOVPE
T. Benyattou
,
M.A. Garcia
,
S. Monéger
,
A. Tabata
,
M. Sacilotti
,
P. Abraham
,
Y. Monteil
,
R. Landers
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 241 KB
Your tags:
english, 1993
40
Temperature dependence analysis of the optical transmission spectra in InGaAs/InP multi quantum well structures
C. Arena
,
L. Tarricone
,
F. Genova
,
G. Morello
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 267 KB
Your tags:
english, 1993
41
Lifetime and diffusion length inhomogeneity controlled by point and extended defect interaction in n-GaAs LEC
A. Castaldini
,
A. Cavallini
,
E. Gombia
,
R. Mosca
,
L. Tarricone
,
A. Motta
,
L. Bora
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 264 KB
Your tags:
english, 1993
42
Mapping of the local minority carrier diffusion length in silicon wafers
Michael Stemmer
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 493 KB
Your tags:
english, 1993
43
Evaluation of the minority carrier lifetime and diffusion coefficient of cast polycrystalline silicon wafers by the dual mercury probe method
Eiichi Suzuki
,
Yutaka Hayashi
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 345 KB
Your tags:
english, 1993
44
In-situ quality monitoring during the deposition of a-Si:H films
Christian Haffer
,
Marinus Kunst
,
Carsten Swiatkowski
,
Günter Seidelmann
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 255 KB
Your tags:
english, 1993
45
Non-destructive identification of end-of-range damage in ion-implanted and annealed silicon
Yu. Shreter
,
J.H. Evans
,
B. Hamilton
,
A.R. Peaker
,
C. Hill
,
D.R. Boys
,
C.D. Meekison
,
G.R. Booker
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 338 KB
Your tags:
english, 1993
46
Correlation of photoluminescence and nuclear characterization of In-implanted silicon
M.O. Henry
,
T.B. Kehoe
,
M.H. Nazare
,
K. Freitag
,
R. Vianden
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 210 KB
Your tags:
english, 1993
47
Accurate infrared spectroscopy analysis in back-side damaged silicon wafers
B. Garrido
,
J.A. Moreno
,
J. Samitier
,
J.R. Morante
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 233 KB
Your tags:
english, 1993
48
Chemical composition of porous silicon layers studied by IR spectroscopy
W. Theiss
,
P. Grosse
,
H. Münder
,
H. Lüth
,
R. Herino
,
M. Ligeon
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 273 KB
Your tags:
english, 1993
49
Stoichiometry of oxygen precipitates in silicon
B. Pivac
,
A. Borghesi
,
M. Geddo
,
A. Sassella
,
A. Stella
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 250 KB
Your tags:
english, 1993
50
Optical characterization of semiconductors containing inhomogeneous layers
Gustavo E. Aizenberg
,
Pieter L. Swart
,
Beatrys M. Lacquet
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 303 KB
Your tags:
english, 1993
51
Nonlinear recombinations in photoreflectance characterization of silicon wafers
B.C. Forget
,
D. Fournier
,
V.E. Gusev
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 240 KB
Your tags:
english, 1993
52
Investigation of the relaxation of excess carriers in SiGe-heterostructures by photothermal measurement
H.D. Geiler
,
S. Krügel
,
J. Nützel
,
E. Friess
,
G. Abstreiter
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 322 KB
Your tags:
english, 1993
53
Epioptic analysis of the initial ordered growth of Au on Si(111)
J.D. O'Mahony
,
J.F. McGilp
,
M.H.W. Verbruggen
,
C.F.J. Flipse
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 148 KB
Your tags:
english, 1993
54
Diagnostics of the silicon-insulator interface structure by optical second-harmonic generation
I.V. Kravetsky
,
L.L. Kulyuk
,
A.V. Micu
,
D.A. Shutov
,
E.E. Strumban
,
C. Cobianu
,
D. Dascalu
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 193 KB
Your tags:
english, 1993
55
Atomic scale simulation of crystal growth applied to the calculation of the photoemission current
M. Djafari Rouhani
,
N. Fazouan
,
A.M. Gue
,
D. Esteve
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 227 KB
Your tags:
english, 1993
56
Potential step imaging of interfaces in MBE-grown structures
B. Hugsted
,
J. Gjønnes
,
J. Taftø
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 339 KB
Your tags:
english, 1993
57
Using the metal-oxide-polysilicon-silicon (MOPS) structure to determine LPCVD polysilicon quality
Julian C. Carter
,
Alan G.R. Evans
,
Kraisorn Throngnumchai
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 150 KB
Your tags:
english, 1993
58
Combined low-frequency noise and random telegraph signal analysis of silicon MOSFET's
E. Simoen
,
U. Magnusson
,
C. Claeys
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 310 KB
Your tags:
english, 1993
59
Effect of near-surface damage on C-V measurements of Schottky barrier diodes
D. Bauza
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 220 KB
Your tags:
english, 1993
60
The impact of high-field stressing on C-V characteristics of irradiated gate oxides
T. Brożek
,
B. Pešić
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 259 KB
Your tags:
english, 1993
61
Effects of diffusion-induced defects on the carrier lifetime
A. Castaldini
,
A. Cavallini
,
B. Fraboni
,
E. Giannotte
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 486 KB
Your tags:
english, 1993
62
In situ bulk lifetime measurement on silicon with a chemically passivated surface
T.S. Horányi
,
T. Pavelka
,
P. Tüttö
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 462 KB
Your tags:
english, 1993
63
Infrared analysis of buried insulator layers formed by ion implantation into silicon
J. Samitier
,
S. Martinez
,
A. El Hassani
,
A. Pérez-Rodríguez
,
J.R. Morante
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 214 KB
Your tags:
english, 1993
64
Electrochemical etching and profiling of silicon
T.S. Horányi
,
P. Tüttö
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 306 KB
Your tags:
english, 1993
65
Author index
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 284 KB
Your tags:
english, 1993
66
Subject index
Journal:
Applied Surface Science
Year:
1993
Language:
english
File:
PDF, 632 KB
Your tags:
english, 1993
1
Follow
this link
or find "@BotFather" bot on Telegram
2
Send /newbot command
3
Specify a name for your chatbot
4
Choose a username for the bot
5
Copy an entire last message from BotFather and paste it here
×
×