Stoichiometry of oxygen precipitates in silicon
B. Pivac, A. Borghesi, M. Geddo, A. Sassella, A. StellaVolume:
63
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0169-4332(93)90099-w
File:
PDF, 250 KB
english, 1993