Atomic layer epitaxy of device quality AlGaAs and AlAs
N. Hayafuji, G.M. Eldallal, A. Dip, P.C. Colter, N.A. El-Masry, S.M. BedairVolume:
82-83
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0169-4332(94)90189-9
File:
PDF, 475 KB
english, 1994