Adaptive temperature program ALE of Si1 − xGex/Si heterostructures from Si2H6/Ge2H6
S. Asami, N.M. Russell, A. Mahajan, P.A. Steiner IV, D.J. Bonser, J. Fretwell, S. Bannerjee, A. Tasch, J.M. White, J.G. EkerdtVolume:
82-83
Year:
1994
Language:
english
Pages:
8
DOI:
10.1016/0169-4332(94)90242-9
File:
PDF, 1.09 MB
english, 1994