Mechanisms of SiC growth by alternate supply of SiH2Cl2 and C2H2
Hiroyuki Nagasawa, Yoh-ichi YamaguchiVolume:
82-83
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0169-4332(94)90249-6
File:
PDF, 349 KB
english, 1994