Isothermal H2 desorption kinetics from Si(100) 2 × 1: dependence on disilane and atomic hydrogen precursors
L.A. Okada, M.L. Wise, S.M. GeorgeVolume:
82-83
Year:
1994
Language:
english
Pages:
7
DOI:
10.1016/0169-4332(94)90250-x
File:
PDF, 623 KB
english, 1994