The effect of growth parameters on the deposition of CaS thin films by atomic layer epitaxy
J. Rautanen, M. Leskelä, L. Niinistö, E. Nykänen, P. Soininen, M. UtriainenVolume:
82-83
Year:
1994
Language:
english
Pages:
6
DOI:
10.1016/0169-4332(94)90274-7
File:
PDF, 508 KB
english, 1994