Oxidation of TiN thin films in an ion-beam-assisted...

Applied Surface Science 1994 Vol. 82-83; Iss. none

Oxidation of TiN thin films in an ion-beam-assisted deposition process

Hiroshi Kubota, Masanori Nagata, Ryuji Miyagawa, Marc Aurele Nicolet
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Volume:
82-83
Year:
1994
Language:
english
Pages:
4
DOI:
10.1016/0169-4332(94)90276-3
File:
PDF, 341 KB
english, 1994
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