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Determining both adhesion energy and residual stress by measuring the stiction shape of a microbeam
Zhang, Yin, Zhao, Ya-PuVolume:
21
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-014-2127-6
Date:
April, 2015
File:
PDF, 972 KB
english, 2015