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Quality factor measurement for MEMS resonator using time-domain amplitude decaying method
Wang, Yuzhao, Xie, Yong, Zhang, Tianlei, Wu, Guoqiang, Wang, Gang, Yu, CaijiaVolume:
21
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-014-2161-4
Date:
April, 2015
File:
PDF, 1.38 MB
english, 2015