Fast Transistor Threshold Voltage Measurement Method for...

Fast Transistor Threshold Voltage Measurement Method for High-Speed, High-Accuracy Advanced Process Characterization

Tseng-Chin Luo,, Chao, Mango C-T, Huan-Chi Tseng,, Goto, Masaharu, Fisher, Philip A., Yuan-Yao Chang,, Chi-Min Chang,, Takao, Takayuki, Iwasaki, Katsuhito, Cheng Mao Lee,
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Volume:
22
Language:
english
Journal:
IEEE Transactions on Very Large Scale Integration (VLSI) Systems
DOI:
10.1109/TVLSI.2013.2265299
Date:
May, 2014
File:
PDF, 1.40 MB
english, 2014
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