![](/img/cover-not-exists.png)
Damages in AlGaAs/GaAs Heterostructures Induced by KeV-Electron-Beam Irradiation
Wada, Toshimi, Kanayama, Toshihiko, Tada, Tetsuya, Wang, Xue Lun, Sugiyama, Yoshinobu, Komuro, MasanoriVolume:
196-201
Year:
1995
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.196-201.1455
File:
PDF, 336 KB
1995