Morphological Transformation of Oxide Particles and Thresholds for Effective Gettering in Silicon
Falster, Robert, Voronkov, Vladimir, Resnick, V.Y., Mil'vidskii, M.G.Volume:
108-109
Year:
2005
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.108-109.97
File:
PDF, 266 KB
english, 2005