STLM: A Sidewall TLM Structure for Accurate Extraction of...

IEEE Electron Device Letters 2013 / 09 Vol. 34; Iss. 9

STLM: A Sidewall TLM Structure for Accurate Extraction of Ultralow Specific Contact Resistivity

Majumdar, Kausik, Vivekanand, Saikumar, Huffman, Craig, Matthews, Ken, Ngai, Tat, Chen, Chien Hao, Baek, Rock Hyun, Loh, Wei Yip, Rodgers, Martin, Stamper, Harlan, Gausepohl, Steven, Kang, Chang Yong,
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Volume:
34
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2013.2271032
Date:
September, 2013
File:
PDF, 1.09 MB
english, 2013
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