Effects of frequency on optical emission, electrical, ion,...

Effects of frequency on optical emission, electrical, ion, and etching characteristics of a radio frequency chlorine plasma

Donnelly, Vincent M., Flamm, Daniel L., Bruce, Richard H.
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Volume:
58
Year:
1985
Language:
english
DOI:
10.1063/1.335978
File:
PDF, 1003 KB
english, 1985
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