Low temperature channeling measurements of ion implantation lattice disorder in single crystal silicon
Picraux, S. T., Weisenbergers, W. H., Vook, F. L.Volume:
7
Language:
english
Journal:
Radiation Effects
DOI:
10.1080/00337577108232569
Date:
January, 1971
File:
PDF, 691 KB
english, 1971