![](/img/cover-not-exists.png)
Bottom electrode and barrier materials issues in stacked capacitor type ferroelectric memories
Norga, Gerd J., Wouters, Dirk J.Volume:
31
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580008215654
Date:
November, 2000
File:
PDF, 523 KB
english, 2000