Volume 31; Issue 1-4

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Integrated Ferroelectrics
Volume 31; Issue 1-4

Integrated Ferroelectrics

Volume 31; Issue 1-4

1

Process variations in use for the first generations of FRAM® memory products

Davenport, Tom, Mitra, Sanjay

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 1.26 MB

english, 2000

2

Nano-phase ferroelectric cells for Gbit memories

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 423 KB

english, 2000

3

Growth and characterization of epitaxial SrBi 2 Ta 2 O 9 films on (110) SrTiO 3 substrates

Garg, Ashish, Dunn, Steven, Barber, Zoe H.

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 483 KB

english, 2000

4

Lithium niobate thick films grown by rf sputtering: Correlation between optical analysis and transmission electron microscopy observations

Lansiaux, X., Dogheche, E., Remiens, D.

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 617 KB

english, 2000

5

Bottom electrode and barrier materials issues in stacked capacitor type ferroelectric memories

Norga, Gerd J., Wouters, Dirk J.

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 523 KB

english, 2000

6

Mechanisms of Pb(zr 0.53 Ti 0.47 )O 3 thin film etching with ECR/RF reactor

Baborowski, J., Muralt, P., Ledermann, N., Colla, E., Seifert, A., Gentil, S., Setter, N.

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 761 KB

english, 2000

7

Processing and properties of nanocrystalline Pb(Sc 0.5 Ta 0.5 )O 3 , Pb(Sc 0.5 nb 0.5 )O 3 and Pb(Mg 1/3 Nb 2/3 )O 3 films produced by RF-sputtering from ceramic targets

Ziebert, Carlos, Sternberg, Andris, Schmitt, Heinz, Ehses, Karl-Heinz, Krüger, Jan K.

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 406 KB

english, 2000

8

Degradation of Pt/PLZT/Pt capacitors caused by hydrogen in interlayer dielectrics

Suenaga, Kazufumi, Ogata, Kiyoshi, Waki, Hiromichi, Mori, Mitsuhiro

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 400 KB

english, 2000

9

Electrical characterizations of MgTiO 3 thin films grown on Si

Ahn, Soonhong, Lee, Younghun, Roh, Yonghan, Kang, Shinchung, Lee, Jaichan

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 322 KB

english, 2000

10

Pulse-extended excimer laser annealing of lead zirconate titanate thin films

Donohue, P. P., Todd, M. A.

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 896 KB

english, 2000

11

Deposition of large-area graded (Pb 1−x La x )TiO 3 thin films by pulsed laser depesition

Jamn, Gwo, Liu, Kuo-Shung, Lin, I-Nan

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 337 KB

english, 2000

12

Low temperature processing and chacterization of SrBi 2 Nb 2 o 9 thin films grown by pulsed laser ablation

Bhattacharyya, S., Krupanidhi, S. B.

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 383 KB

english, 2000

13

Bottom electrode structures of Pt/Ru and Ru deposited on polycrystalline silicon by MOCVD for DRAM capacitor

Choi, Eun-Suck, Shin, Woong-Chul, Suh, Tae-Seok, Park, Sang-Shik, Yoon, Soon-Gil

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 604 KB

english, 2000

14

Patterning of noble metal electrodes and oxygen barriers by CMP

Schnabel, R. F., Beitel, G., Mainka, G., Sänger, A., Bosk, P., Chen, Z., Small, R., Dehm, C.

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 322 KB

english, 2000

15

Atomic-scale microstructures of SrBi 2 Ta 2 O 9 (SBT) ferroelectric thin films prepared by MOD and PLD for ferams applications

Zhu, Xinhua, Zhu, Tao, Li, Aidong, Yu, Tao, Liu, Zhguo, Ming, Naiben

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 821 KB

english, 2000

16

Forming gas annealing effects on the microstructure and ferroelectricity of SrBi 2 Ta 2 O 9 thin films prepared by metalorganic decomposition

Yu, Tao, Wang, Dong-Sheng, Wu, Di, Li, Ai-Dong, Zhu, Xin-Hua, Hu, An, Liu, Zhi-Guo, Ming, Nai-Ben

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 833 KB

english, 2000

17

Single-grained PZT thin films for high level FRAM integration—fabrication and characterization

Lee, Jang-Sik, Lee, Byung-Il, Joo, Seung-Ki

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 746 KB

english, 2000

18

Guest editorial

Waser, Rainer, Wouters, Dirk, Whatmore, Roger

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 123 KB

english, 2000

19

Crystalline and optical properties of PLZT films prepared by pulsed laser deposition

Kao, Jiann-Shiun, Tsai, Chuen-Horng, Jamn, Gwo, Liu, Kuo-Shung, Lin, I-Nan

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 244 KB

english, 2000

20

A novel diffusion barrier using oxygen stopping layer for high density FRAM

Song, Yoon J., Kim, H. H., Lee, S. Y., Jung, D. J., Koo, B. J., Chang, N. W., Kim, C. J., Kim, Kinam

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 433 KB

english, 2000

21

Novel diffusion control process using ultra thin buffer layer for MFIS memory

Otsuka, Takashi, Ueda, Michihito, Nishikawa, Takashi, Iijima, Kenji, Morita, Kiyoyuki

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 635 KB

english, 2000

22

Integration of H 2 barriers for ferroelectric memories based on SrBi 2 Ta 2 O 9 (SBT)

Hartner, Walter, Schindler, Günther, Bosk, Peter, Gabric, Zonimir, Kastner, Markus, Beitel, Gerhard, Mikolajick, Thomas, Dehm, Christine, Mazuré, Carlos

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 1.15 MB

english, 2000

23

Effects of Ti/Ir top electrodes of PZT capacitors on the hydrogen related degradation

Kim, Jiyoung, Koo, June-Mo, Kim, Tae Ho, Bang, Ilhwan

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 372 KB

english, 2000

24

Growth of MgTiO 3 thin films by pulsed laser deposition and their electrical properties

Kang, Shinchung, Lim, Wangkyu, Lee, Jaichan

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 351 KB

english, 2000

25

Excimer laser ablation processed ferroelectric and antiferroelectric thin films

Krupanidhi, S. B., Saha, S., Bhattacharyya, S., Bharadwaja, S. S. N.

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 467 KB

english, 2000

26

Application of fluorinated SiO 2 interlayer dielectrics for ferroelectric memory

Park, Youngsoo, Chung, Ilsub

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 553 KB

english, 2000

27

Mocvd growth and characterization of PbTiO 3 thin films on Pt/Ti/SiO 2 /Si substrates

Moret, M. P., Rössinger, S. A., Hageman, P. R., Misat, S. I., Devillers, M. A. C., Linden, H. Van Der, Haverkamp, E., Corbeek, W. H. M., Larsen, P. K.

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 748 KB

english, 2000

28

Properties of reactively sputtered IrO x for PZT electrode applications

Fox, Glen R., Sun, Shan, Takamatsu, Tomohiro

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 412 KB

english, 2000

29

Oxidation resistance of TaSiN diffusion barriers

Letendu, F., Hugon, M. C., Desvignes, J. M., Agius, B., Vickridge, I, Kim, D. J., Kingon, A. I.

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 271 KB

english, 2000

30

Formation of ferroelectric nano-domains using scanning force microscopy for the future application of memory devices

Shin, Hyunjung, Woo, Jungwon, Hong, Seungbum, Jeon, Jong Up, Pak, Y. Eugene, No, Kwangsoo

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 510 KB

english, 2000

31

Ferroelectric Na 0.5 K 0.5 NbO 3 thin films by pulsed laser deposition

Cho, Choong-Rae, Grishin, Alex, Moon, Byung-Moo

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 452 KB

english, 2000

32

Effect of ion damage on the crystallization of PZT thin films

Park, Eung-Chul, Lee, Jang-Sik, Park, Jung-Ho, Lee, Byung-Il, Joo, Seung-Ki

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 552 KB

english, 2000

33

Degradation mechanisms of SrBi 2 Ta 2 O 9 ferroelectric thin film capacitors during forming gas annealing

Hartner, Walter, Bosk, Peter, Schindler, Günther, Schroeder, Herbert, Waser, Rainer, Dehm, Christine, Mazuré, Carlos

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 771 KB

english, 2000

34

Preparation of SrBi 2 (Ta, Nb) 2 O 9 thin films by rf sputtering for ferroelectric memory production

Masuda, Takeshi, Miyaguchi, Yusuke, Suu, Koukou, Sun, Shan

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 391 KB

english, 2000

35

Influence of process conditions on the ferroelectric characteristics of SrBi 2 Ta 2 O 9 films prepared by rf magnetron sputtering

Chen, Yi-Chou, Lu, Chung-Hsin

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 435 KB

english, 2000

36

Fabrication of double metal feram without degradation of remnant polarization by using Ir/IrOx capacitor contact barrier layer

Kweon, Soon Yong, Yeom, Seung Jin, Lee, Sahang Kyoo, Yu, Yong Sik, Pyun, Deuk Soo, Kim, Cheong Tae

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 922 KB

english, 2000

37

Characterization of lead cation-incorporated strontium bismuth tantalate ferroelectrics

Lu, Chung-Hsin, Chen, Yi-Chou

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 425 KB

english, 2000

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