Stress-induced dislocations in silicon integrated circuits

IBM Journal of Research and Development 1992 / 03 Vol. 36; Iss. 2

Stress-induced dislocations in silicon integrated circuits

Fahey, P. M., Mader, S. R., Stiffler, S. R., Mohler, R. L., Mis, J. D., Slinkman, J. A.
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Volume:
36
Language:
english
Journal:
IBM Journal of Research and Development
DOI:
10.1147/rd.362.0158
Date:
March, 1992
File:
PDF, 2.25 MB
english, 1992
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