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Vapor phase anti-stiction coatings for MEMS
Ashurst, W.R., Carraro, C., Maboudian, R.Volume:
3
Language:
english
Journal:
IEEE Transactions on Device and Materials Reliability
DOI:
10.1109/TDMR.2003.821540
Date:
December, 2003
File:
PDF, 311 KB
english, 2003