Effects of surface preparation on the electrical and...

IEEE Electron Device Letters 1994 / 11 Vol. 15; Iss. 11

Effects of surface preparation on the electrical and reliability properties of ultrathin thermal oxide

Kafai Lai,, Ming-yin Hao,, Wei-ming Chen,, Lee, J.C.
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Volume:
15
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/55.334662
Date:
November, 1994
File:
PDF, 285 KB
english, 1994
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