High-Performance and Low-Temperature-Compatible p-Channel...

High-Performance and Low-Temperature-Compatible p-Channel Polycrystalline-Silicon TFTs Using Hafnium-Silicate Gate Dielectric

Yang, Ming-Jui, Chien, Chao-Hsin, Lu, Yi-Hsien, Luo, Guang-Li, Chiu, Su-Ching, Lou, Chun-Che, Huang, Tiao-Yuan
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Volume:
28
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2007.904901
Date:
October, 2007
File:
PDF, 349 KB
english, 2007
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