AlGaAs/GaAs HBTs fabricated by a self-alignment technology...

IEEE Electron Device Letters 1988 / 11 Vol. 9; Iss. 11

AlGaAs/GaAs HBTs fabricated by a self-alignment technology using polyimide for electrode separation

Morizuka, K., Asaka, M., Iizuka, N., Tsuda, K., Obara, M.
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Volume:
9
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/55.9288
Date:
November, 1988
File:
PDF, 227 KB
english, 1988
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