Stress Hybridization for Multigate Devices Fabricated on...

IEEE Electron Device Letters 2007 / 07 Vol. 28; Iss. 7

Stress Hybridization for Multigate Devices Fabricated on Supercritical Strained-SOI (SC-SSOI)

Collaert, N., Rooyackers, R., De Keersgieter, A., Leys, F.E., Cayrefourcq, I., Ghyselen, B., Loo, R., Jurczak, M.
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Volume:
28
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2007.900174
Date:
July, 2007
File:
PDF, 128 KB
english, 2007
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