Improved Electrical Performance and Uniformity of MILC...

IEEE Electron Device Letters 2009 / 11 Vol. 30; Iss. 11

Improved Electrical Performance and Uniformity of MILC Poly-Si TFTs Manufactured Using Drive-In Nickel-Induced Lateral Crystallization

Chih-Pang Chang,, Wu, Y.-C.S.
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Volume:
30
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2009.2031130
Date:
November, 2009
File:
PDF, 441 KB
english, 2009
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