Low-Temperature Passivation of Amorphous-Silicon Thin-Film...

IEEE Electron Device Letters 2007 / 07 Vol. 28; Iss. 7

Low-Temperature Passivation of Amorphous-Silicon Thin-Film Transistors With Supercritical Fluids

Tsai, Chih-Tsung, Liu, Po-Tsun, Chang, Ting-Chang, Wang, Chen-Wen, Yang, Po-Yu, Yeh, Fon-Shan
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Volume:
28
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2007.897869
Date:
July, 2007
File:
PDF, 119 KB
english, 2007
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