Nanocrystalline Si-Based Resistive Humidity Sensors...

IEEE Electron Device Letters 2012 / 06 Vol. 33; Iss. 6

Nanocrystalline Si-Based Resistive Humidity Sensors Prepared via HWCVD at Various Filament Temperatures

Hsueh, T. J., Chen, Y. H., Weng, W. Y., Tsai, T. Y., Hsueh, H. T., Hus, C. L., Dai, B. T., Shieh, J. M.
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Volume:
33
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2012.2192711
Date:
June, 2012
File:
PDF, 416 KB
english, 2012
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