High-Performance Self-Aligned Bottom-Gate Low-Temperature...

IEEE Electron Device Letters 2007 / 07 Vol. 28; Iss. 7

High-Performance Self-Aligned Bottom-Gate Low-Temperature Poly-Silicon Thin-Film Transistors With Excimer Laser Crystallization

Tsai, Chun-Chien, Chen, Hsu-Hsin, Chen, Bo-Ting, Cheng, Huang-Chung
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Volume:
28
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2007.899326
Date:
July, 2007
File:
PDF, 491 KB
english, 2007
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