Designing a reliability demonstration test on a lithography...

IEEE Transactions on Components Packaging and Manufacturing Technology Part A 1994 / Sept. Vol. 17; Iss. 3

Designing a reliability demonstration test on a lithography expose tool using Bayesian techniques

Villacourt, M., Mahaney, M.
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Volume:
17
Language:
english
Journal:
IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part A
DOI:
10.1109/95.311756
Date:
January, 1994
File:
PDF, 425 KB
english, 1994
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