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New Device Structure Using Array Transistors and Flexible U-Grooves Suitable for 18-V, High-Performance SOI Complementary Bipolar LSIs
Tamaki, Y., Tsuji, K., Otani, O., Nonami, H., Tomatsuri, T., Yoshida, E., Hamamoto, M., Nakazato, N.Volume:
18
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2005.845017
Date:
May, 2005
File:
PDF, 1.55 MB
english, 2005