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Nitridation of silicon-dioxide films grown on 6H silicon carbide
Dimitrijev, S., Hui-Feng Li,, Harrison, H.B., Sweatman, D.Volume:
18
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/55.568752
Date:
May, 1997
File:
PDF, 57 KB
english, 1997