Poly-Si TFTs With Three-Dimensional Finlike Channels...

IEEE Electron Device Letters 2011 / 02 Vol. 32; Iss. 2

Poly-Si TFTs With Three-Dimensional Finlike Channels Fabricated Using Nanoimprint Technology

Chen, Henry J. H., Jhang, Jia-Rong, Huang, Chien-Jen, Chen, Sun-Zen, Huang, Ju-Chun
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Volume:
32
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2010.2090333
Date:
February, 2011
File:
PDF, 253 KB
english, 2011
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