Impact of Using Double-Patterning Versus Single-Patterning...

IEEE Electron Device Letters 2013 / 05 Vol. 34; Iss. 5

Impact of Using Double-Patterning Versus Single-Patterning on Threshold Voltage $(V_{\rm TH})$ Variation in Quasi-Planar Tri-Gate Bulk MOSFETs

Shin, Changhwan, Park, In Jun
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Volume:
34
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2013.2249653
Date:
May, 2013
File:
PDF, 414 KB
english, 2013
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