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Electrical characterization of photo-oxidized Si1−x−yGexCy films
Peter J. Bjeletich, Jeff J. Peterson, Ángel Cuadras, Qi Fang, Jun-Ying Zhang, McDonald Robinson, Ian W. Boyd, Charles E. HuntVolume:
72
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2003.12.040
File:
PDF, 184 KB
english, 2004