All oxide transparent MISFET using high-k dielectrics gates

All oxide transparent MISFET using high-k dielectrics gates

Kenji Nomura, Hiromichi Ohta, Kazushige Ueda, Toshio Kamiya, Masahiro Hirano, Hideo Hosono
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Volume:
72
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2004.01.007
File:
PDF, 271 KB
english, 2004
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