Electrical characterization and reliability aspects of...

Microelectronic Engineering 2004 Vol. 72; Iss. 1-4

Electrical characterization and reliability aspects of zirconium silicate films obtained from novel MOCVD precursors

M Lemberger, A Paskaleva, S Zürcher, A.J Bauer, L Frey, H Ryssel
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Volume:
72
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2004.01.010
File:
PDF, 388 KB
english, 2004
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