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Impact of line edge roughness on the resistivity of nanometer-scale interconnects
W. Steinhögl, G. Schindler, G. Steinlesberger, M. Traving, M. EngelhardtVolume:
76
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2004.07.005
File:
PDF, 304 KB
english, 2004