Development of a hybrid CVD/SOD integration sequence for...

Microelectronic Engineering 2004 Vol. 76; Iss. 1-4

Development of a hybrid CVD/SOD integration sequence for reliable, high performance interconnect systems

J. Waeterloos, S. Cummings, Y. Ohmoto, L. Archer, R. Stevens, S. Lucero, K. Yang, J. Im, M. Mills, R. Strittmatter, E. Beach, S. Rozeveld
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Volume:
76
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2004.07.027
File:
PDF, 442 KB
english, 2004
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