Studies of structures elaborated by focused ion beam induced deposition
M. Prestigiacomo, L. Roussel, A. Houël, P. Sudraud, F. Bedu, D. Tonneau, V. Safarov, H. DallaportaVolume:
76
Year:
2004
Language:
english
Pages:
7
DOI:
10.1016/j.mee.2004.07.047
File:
PDF, 447 KB
english, 2004