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Studies of structures elaborated by focused ion beam...

Studies of structures elaborated by focused ion beam induced deposition

M. Prestigiacomo, L. Roussel, A. Houël, P. Sudraud, F. Bedu, D. Tonneau, V. Safarov, H. Dallaporta
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Volume:
76
Year:
2004
Language:
english
Pages:
7
DOI:
10.1016/j.mee.2004.07.047
File:
PDF, 447 KB
english, 2004
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