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Determining the impact of statistical fluctuations on resist line edge roughness
L.H.A. Leunissen, M. Ercken, G.P. PatsisVolume:
78-79
Year:
2005
Language:
english
Pages:
9
DOI:
10.1016/j.mee.2004.12.005
File:
PDF, 289 KB
english, 2005