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Micromachining of organic polymers by X-ray photo-etching using a 10 Hz laser-plasma radiation source
A. Bartnik, H. Fiedorowicz, R. Jarocki, L. Juha, J. Kostecki, R. Rakowski, M. SzczurekVolume:
78-79
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2004.12.058
File:
PDF, 225 KB
english, 2005