Ge effects on silicidation

Microelectronic Engineering 2005 Vol. 82; Iss. 3-4

Ge effects on silicidation

Paul R. Besser, Paul King, Eric Paton, Stephen Robie
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Volume:
82
Year:
2005
Language:
english
Pages:
7
DOI:
10.1016/j.mee.2005.07.044
File:
PDF, 334 KB
english, 2005
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